Produkt-Details
Place of Origin: CHINA
Markenname: ZMSH
Zertifizierung: rohs
Model Number: 2 Inch Quartz Wafer
Zahlungs-u. Verschiffen-Ausdrücke
Minimum Order Quantity: 10
Preis: by case
Packaging Details: Package in 100-grade cleaning room
Delivery Time: 5-8weeks
Payment Terms: T/T
Diameter: |
2 inch (50.8mm) |
Thickness Range: |
0.1mm~1.0mm |
Material Purity: |
≥99.99% |
Surface Roughness (Ra): |
≤5nm |
Total Thickness Variation: |
≤10μm |
Transmittance (@193nm): |
>90% |
Diameter: |
2 inch (50.8mm) |
Thickness Range: |
0.1mm~1.0mm |
Material Purity: |
≥99.99% |
Surface Roughness (Ra): |
≤5nm |
Total Thickness Variation: |
≤10μm |
Transmittance (@193nm): |
>90% |
The 2-inch quartz wafer is a high-performance substrate material made from high-purity synthetic quartz (Fused Silica), featuring excellent optical transparency, extremely low thermal expansion coefficient, and outstanding chemical stability. 2 inch quartz wafer is widely used in high-end applications such as semiconductor manufacturing, optoelectronics, MEMS/NEMS, and scientific optics, serving as a critical foundational material for precision optical components and microelectronic devices.
ZMSH specializes in the R&D, production, and customization of high-precision quartz wafers. We provide tailored solutions to meet customer requirements for various specifications (e.g., diameter, thickness, surface treatment) using advanced processing techniques such as precision polishing, laser cutting, and coating. Our products guarantee exceptional dimensional accuracy (TTV ≤10μm) and surface quality (Ra ≤5nm). Additionally, we offer rapid prototyping for small batches and large-scale mass production to support customers throughout the entire development-to-production cycle.
ZMSH's quartz wafers strictly comply with industry standards and are suitable for harsh industrial environments (e.g., high temperatures, highly corrosive conditions). They can also be customized with optical coatings such as anti-reflection (AR) or infrared (IR) enhancement to meet specific application needs. Leveraging mature production technology and a rigorous quality control system, we are committed to providing global customers with high-performance, highly reliable quartz glass solutions.
Parameter | Specification |
Diameter | 2 inch (50.8mm) |
Thickness Range | 0.1mm~1.0mm |
Material Purity | ≥99.99% |
Surface Roughness (Ra) | ≤5nm |
Total Thickness Variation | ≤10μm |
Transmittance (@193nm) | >90% |
Coefficient of Thermal Expansion | ~0.55×10⁻⁶/°C |
Softening Point | ~1665°C |
1. High-Purity Material: Made from synthetic quartz (Fused Silica) with purity ≥99.99%, ensuring superior optical and chemical stability.
2. Excellent Thermal Stability: Low thermal expansion coefficient (~0.55×10⁻⁶/°C) and high-temperature resistance (softening point ~1665°C), suitable for high-temperature processes.
3. High Optical Transmittance: Superior light transmission (>90%) across UV to IR wavelengths (190nm–3500nm).
4. Exceptional Flatness: Low surface roughness (Ra ≤5nm) and tight total thickness variation (TTV ≤10μm), meeting the demands of precision lithography and coating applications.
5. Chemical Inertness: Resistant to strong acids (except HF), alkalis, and organic solvents, making it ideal for harsh chemical environments.
The 2-inch quartz wafer is widely used in advanced technology fields due to its high purity, thermal stability, and optical performance. Key applications include:
· Photomask Substrates: Used as base materials for photomasks in IC pattern transfer, requiring ultra-high flatness and low defect rates.
· Etching Process Carriers: Serve as trays for wafer handling in dry and wet etching processes, offering corrosion resistance without affecting process stability.
· CMP Pads: Applied in wafer planarization to ensure uniform polishing and minimize surface damage.
· Ion Implantation Shields: Act as barrier layers in doping processes, withstanding high temperatures without interfering with ion beam penetration.
· Optical Filters & Windows: Used in UV, visible, and IR optical systems, such as laser protective windows and spectrometer components.
· Fiber Optic Components: Serve as end-face connectors and WDM substrates, ensuring low optical loss and high signal transmission efficiency.
· High-Power Laser Optics: Utilized in CO₂ lasers and femtosecond laser systems as mirrors and lenses, offering high-temperature resistance and laser damage tolerance.
· Microsensor Substrates: Used in pressure sensors and accelerometers, providing high mechanical strength and thermal stability.
· Microfluidic Chips: Employed in biomedical detection as microchannel structures, with chemical inertness preventing sample contamination.
· Nanoimprint Templates: Enable high-precision pattern replication at the nanoscale.
ZMSH offers customized machining services for quartz plates with precision through-holes, catering to applications in optics, semiconductor packaging, and sensors. Our products feature high-accuracy drilling, custom-shaped cutting, and surface treatment, ensuring dimensional tolerances of ±0.01mm. ZMSH provide rapid prototyping and mass production to meet stringent requirements across various applications.
1. Q: What is a 2-inch quartz wafer used for?
A: 2-inch quartz wafers are primarily used as substrates for semiconductor photomasks, optical components, and MEMS devices due to their high thermal stability and UV transparency.
2. Q: How to clean 2-inch quartz wafers?
A: Clean 2-inch quartz wafers with RCA standard cleaning (SC-1/SC-2) or Piranha solution, followed by DI water rinse and nitrogen drying for contamination-free surfaces.
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